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SEMI E28-92 (Reapproved 0710)
1 The scope of this Standard is grades and tiers of hydrochloric acid used in the semiconductor industry
SEMI C79 — Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems
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F09800 - SEMI F98 - Guide for Treatment of Reuse Water in Semiconductor Processing Revision:SEMI F98-0305 (Reapproved 1111) - Superseded and Rest of World* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1
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